| (1)MEMS/NEMS Modeling and simulation
(2)CMOS MEMS processing and smart sensors
(3)Wireless microsystems
Recent Research Project：
Wireless passive multifunction microsensors, NSFC,2012-2016
CMOS MEMS, prosessing modeling and test structures, National Major S&T Profject, 2011-2014 |
| Qing-An Huang received the B.S. degree from Hefei University of Technology, Hefei, China, in 1983, the M.S. degree from Xidian University, Xi’an, China, in 1987, and the Ph.D. degree from Southeast University, Nanjing, China, in 1991, all in electronic engineering. His Ph.D. research focused on micromachined GaAs piezoelectric sensors.
After graduation, he joined the faculty of the Department of Electronic Engineering, Southeast University, where he became a Full Professor in 1996, and was appointed to Chair Professor for the Chang-Jiang Scholar by the Ministry of Education in 2004. He is currently the Founding Director of the Key Laboratory of MEMS of the Ministry of Education, Southeast University. He has authored a book entitled Silicon Micromachining Technology (Science Press, 1996), and published over 150 peer-reviewed international journals/conference papers. He is the holder of 40 Chinese patents.
Dr. Huang has currently served as Editor-in-Chief of the Chinese Journal of Sensors and Actuators and Editorial Board member of the Journal of Micromechanics and Microengineering. He was a Conference Co-chair for the SPIE-Microfabrication and Micromachining Process Technology and Devices (Proc.SPIE, vol.4601, 2001), TPC Co-chair of the 7th IEEE NEMS(Kyoto, 2012) and the 6th Asia-Pacific Conference of Transducers and Micro/Nano Technologies (Nanjing, 2012), TPC Member of Transducers from 2009-2013 and IEEE Sensors Conference through 2002 to 2013. Dr. Huang has served as the Founding Chairman of IEEE ED-SSC Nanjing Chapter. He received the National Outstanding Youth Science Foundation Award of China in 2003. |
| 1.R.G. Li and Q.-A. Huang*, “System-Level Modeling of Surface Micromachined Beamlike Electrothermal Microactuators,”(Chapter 5) , in System-level Modeling of MEMS, edited by T. Bechtold, G. Schrag, and L. Feng, Wiley-VCH, pp.125-145, 2013.
2.Q.-A. Huang*, R.G. Li, Q. Liu, and N.K.S. Lee, “Surface Micromachined Electrothermal Microactuators”, in Encyclopedia of Sensors, edited by C.A. Grimes, E.C. Dickey, and M.V. Pishko, American Scientific Publishers, vol.10, pp.93-106, 2006.
3.L.F. Wang, J.Y. Tang, and Q.-A. Huang*, “Effect of environmental humidity on dielectric charging effect in RF MEMS capacitive switches based on C–V properties,” Journal of Microelectromechanical Systems, 22(3), 637 (2013).
4.L.F. Wang, L. Han, J.Y. Tang, and Q.-A. Huang*, “Lateral contact three-state RF MEMS switch for ground wireless communication by actuating rhombic structures,” Journal of Microelectromechanical Systems, 22(1), 10 (2013).
5.Z.Q. Dong, J.J. Chen, Y.K. Qin, M. Qin, and Q.A. Huang*, “Fabrication of a micromachined two-dimensional wind sensor by Au-Au wafer bonding technology,” Journal of Microelectromechanical Systems, 21(2), 467 (2012).
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