1.论文 (1) Zhiqiang Zhang and Xiaoping Liao, “A Thermocouple-Based Self-Heating RF Power Sensor With GaAs MMIC-Compatible Micromachining Technology”, IEEE Electron Device Letters, 2012, vol. 33, no. 4, pp. 606-608. (2) Zhiqiang Zhang and Xiaoping Liao, “Micromachined GaAs MMIC-Based Spiral Inductors With Metal Shores and Patterned Ground Shields” IEEE Sensors Journal, 2012, vol. 12, no. 6, pp. 1853-1860. (3) Zhiqiang Zhang and Xiaoping Liao, “GaAs MMIC Fabrication for the RF MEMS Power Sensor With Both Detection and Non-Detection States”, Sensors and Actuators A: Physical, 2012, vol. 188, pp. 29-34. (4) Zhiqiang Zhang and Xiaoping Liao, “A Three-Channel Thermoelectric RF MEMS Power Sensor for GaAs MMIC Applications”, Sensors and Actuators A: Physical, 2012, vol. 182, pp. 68-71. (5) Zhiqiang Zhang and Xiaoping Liao, “Packaging-Test-Fixture for In-line Coupling RF MEMS Power Sensors”, IEEE/ASME Journal of Microelectromechanical Systems, 2011, vol. 20, no. 6, pp. 1231-1233. 2.专利 (1) 廖小平和张志强, MEMS固支梁式在线微波功率传感器及其制备方法, 授权发明专利, 101915871B. (2) 廖小平和张志强, MEMS悬臂梁式在线微波功率传感器及其制备方法, 授权发明专利, 101915870B. |